CRM for the calibration of high magnification KRC-HMC-100

CRM for the calibration of high magnification KRC-HMC-100

    Overview of KRC-HMC-100
  • The High Magnification Calibrator (HMC) is a CRM to calibrate the magnification of atomic force microscopes (AFM) and scanning electron microscopes (SEM) by comparing the measured and certified pitch values.
  • KRC-HMC-100 is also used to calibrate the offset values in AFM and SEM measurements by comparing the measured and certified width values.
    Specifications of KRC-HMC-100
  • Item Detailed Specifications
    Pattern width 5 certified widths of 20 nm ~ 80 nm
    Pattern pitch 5 certified pitchs of 100 nm ~ 900 nm
    Pattern height 70 nm (not certified)
    Pattern length 4.0 mm (certified area: 3.0 mm from center)
    Roughness (Rq) max 0.5 nm
    Defectivity max 2% (max 60 um within 3,000 μ certified area)
    Traceability Si lattice constant measured by TEM: ILAC-MRA, KOLAS
    Calibration of microscope by KRC-HMC-100
  • AFM
    Offset Calibration
  • AFM
    Magnification Calibration
  • SEM
    Magnification Calibration
  • Structure of Nano Pattern
  • KRC-HMC-100

  • Circular coupon type product
  • KRC-HMC-100P [CC-X]

  • Wafer type product
  • KRC-HMC-100P [W-X]