CRM for the calibration of high magnification KRC-HMC-100
CRM for the calibration of high magnification KRC-HMC-100
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Overview of KRC-HMC-100
- The High Magnification Calibrator (HMC) is a CRM to calibrate the magnification of atomic force microscopes (AFM) and scanning electron microscopes (SEM) by comparing the measured and certified pitch values.
- KRC-HMC-100 is also used to calibrate the offset values in AFM and SEM measurements by comparing the measured and certified width values.
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Specifications of KRC-HMC-100
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Item Detailed Specifications Pattern width 5 certified widths of 20 nm ~ 80 nm Pattern pitch 5 certified pitchs of 100 nm ~ 900 nm Pattern height 70 nm (not certified) Pattern length 4.0 mm (certified area: 3.0 mm from center) Roughness (Rq) max 0.5 nm Defectivity max 2% (max 60 um within 3,000 μ certified area) Traceability Si lattice constant measured by TEM: ILAC-MRA, KOLAS
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Calibration of microscope by KRC-HMC-100
- AFM
Offset Calibration - AFM
Magnification Calibration - SEM
Magnification Calibration
- Structure of Nano Pattern
- Circular coupon type product
- Wafer type product
KRC-HMC-100
KRC-HMC-100P [CC-X]
KRC-HMC-100P [W-X]